Brochure

PDF (622KB)

Cylindrical Coordinate Clean Robot
PHT-R-4

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PDF (684KB)

Wafer Cassette Changer
PCT2022

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PDF (1.2MB)

Wafer Transfer Device
PWT2020

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PDF (1.17MB)

Wafer Quartz Glass Wafer Transfer Equipment
12" Compatible Single

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PDF (729KB)

EFEM & SORTER

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PDF (1.25MB)

Automatic Wafer Demounter
PWD2010

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