EFEM & SORTER

EFEM & SORTER

Equipped with a high-performance AC servo motor, it achieves high-speed transfer with ample payload capacity. Robots, load ports, and hands can be arranged optimally. Inheriting more than 20 years of robot technology operating in harsh environments.

Standard Specifications

Transport Target
300 mm wafer
Diameter: Φ300 ± 0.2 mm, Thickness: 775 μm
Career
300mm FOUP 25 stages (SEMI E47.1)
300mm FOSB 25 stages (SEMI M31)
Power Voltage
Single phase, AC200V ± 10%, 50/60 Hz ± 5%
Consumption Current
4 kVA (20 A/200 VAC) including FFU
Vacuum (original pressure)
-80 kPa to -90 kPa
Positive Pressure (original pressure)
0.6MPa-0.7MPa
EMO Contact Output
2 lines (dry contact)
Interlock
8 inputs/8 outputs (isolated I/O)

Equipment Specifications

TYK2102-2
TYK2102-3
Number of Ports
2 Ports
Number of Ports
3 Ports
Vacuum (flow rate)
40L/min
Vacuum (flow rate)
50L/min
Positive Pressure (flow rate)
20L/min
Positive Pressure (flow rate)
30L/min

Features

  • 1 or 2 aligners can be installed, enabling high throughput
  • Various variations, custom correspondence
  • 200 mm/300 mm compatible