Wafer Cassette Changer

Wafer Cassette Changer PCT2022

This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette. The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.

Equipment Specifications
(Treated Material)

Dicing Frame
Size
200mm & 300mm
Thickness
1.22 ± 0.08mm
Warp
0.25mm or less
Contactable Range
Back side
Career
Standard Cassette
Cassette with 6 sheets & Cassette with 13 sheets
Frame Storage Pitch
15mm
Throughput
Takt Time & Transportation Time
180 seconds/13 sheets or less