Wafer Transfer Robot
(Wafer Handler)

Cylindrical Coordinate Clean Robot PHT-R-4

This product is a horizontal articulated robot used in clean rooms.
Back and forth (X-axis), swivel (θ-axis), up-and-down (Z-axis) + hand rotation (0 to 180°) operations are possible, supporting wafer transfer in the atmosphere. The drive motor is an AC servomotor with absolute encoder specifications for all axes.

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Overview

Model
PHT-R-4
Installation Environment
Inside the clean room, in the atmosphere, temperature: 10°C to 35°C, humidity: 70% RH or less
Arm
Single arm
Material: aluminum, CFRP, ceramic
Operating Range
X-axis: 500mm, θ-axis: 340deg, Z-axis: 300mm, Hand rotation: 0-180°
Operating Speed (fastest)
X-axis: 500mm/sec, θ-axis: 200deg/sec, Z-axis: 250mm/sec, Hand rotation: 180deg/sec
Transportable Mass
3kg (total weight of hand base, hand and workpiece)

Robot Standard Specifications

Robot Type
PHT-R-4-2022
Transported Object
～300mm wafer
(We also flexibly customize other special workpieces, shapes, and materials.)
Wafer Holding Method
Vacuum adsorption/edge clamp/edge hold
Machine Structure Type
Horizontal articulated type, Cylindrical coordinate system
Control Axis
4 axes
Motor Type
AC servo motor, Absolute encoder specifications
Weight
Body weight: approx. 47kg; Controller: approx. 8kg
Control Cable
3m (standard), 5m, 10m
Control Specifications (1)
Parallel Interface
Input 32 points
Output 32 points
Control Specifications (2)
Serial Interface
RS-232C × 1 line
Repeatability Accuracy
±0.1mm or less
Degree of Cleanliness
ISO class 2 (0.1μm or more, 10pieces/m³ or less)
Utility
Rated voltage: Single-phase AC200-230V±10%
Rated current: 5A
Vacuum: -80kPa or less 10NL/min or more
Controller Specifications
Controller Type
MFD
Interface
RS232C 1 line Digital IO input: 32 points, DC24V 8mA Output: 32 points, DC24V±3V 0.1A or less

External View
(standard specification)

This drawing and the information contained in it are confidential and property of PHT.
Thus cannot be copied or disclosed to a third party without the consent of PHT.